面向绿色低碳的半导体湿电子化学品回收工艺

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中图分类号：TQ223 文献标志码：A文章编号：1001-5922（2026）03-0787-04

Green and low-carbon oriented recovery process of wet electronic chemicals for semiconductors

LI Feng （ Jiangsu Longdong Advanced Materials Co.，Ltd. ，Changzhou 2130oo，Jiangsu China）

Abstract：A vacuum distilation process was established in the experiment to realize the recovery and utilizationof N-methylpyrolidone（NMP）and diethylene glycol ethyl ether（DGDE），the organic components in waste stripping solution，and the process conditions of vacuum distilation were optimized.The results showed that under the conditions of a reflux ratio of 1：1 and a pressure of 30kPa ，the mass fraction of the NMP and DGDE mixture in the recovered product of the waste stripping solution reached 99.95% with the water content lower than 0.1% . Meanwhile， the recovery rate of the NMP and DGDE mixture reached 92.39% ，and the content of metal ions in the recovered product was lower than1 ppb.Inconclusion，this vacuum distillation processcanrealize the effective separation，recovery and utilization of organic components in the waste stripping solution，which can reduce the consumption of newchemicals in the semiconductor industry and the discharge of waste materials.

Key words ：semiconductor; vacuum distilltion ;diethylene glycol ethyl ether; reflux ratio ; moisture

在半导体产业的快速发展过程中，湿电子化学品被大量消耗，进而产生较多富含有机成分的废液，对环境造成严重的负担。（剩余5819字）