磁控溅射镀膜电源模糊PI-超螺旋滑模混合控制研究

打开文本图片集

中图分类号：TB9;TM46 文献标志码：A 文章编号：1674-5124（2026）02-0135-10

Abstract：In order to address the poor disturbance rejection and slow response speed inherent in the conventional dual-loop PI control typically used in magnetron sputering coating power supplies，this paper proposes a fuzzy PI and super twisting sliding mode control algorithm based on an extended state observer.To accommodate varying operating conditions， the outer loop is designed as a switchable fuzzy PI controller that regulates the output voltage，current， and power. Meanwhile，to suppress the disturbance to the interleaved paralel Buck circuit caused by the small output capacitance of the three-phase rectifier，the inner loop is designed asa super twisting sliding mode control based onan extended state observer，which achieves suppression of unmodeled and disturbance components in the system. Digital simulations and prototype experiments demonstrate that，compared with conventional dual-loop PI control， the proposed method

improves the response speed by 23.1% and enhances the input voltage disturbance rejection by 74.6% in simulations，aswell as a 49.0% improvement in response speed and a 50.0% improvement in disturbance rejection in prototype experiments，thereby confirming its superior performance in both response speed and disturbance rejection.

Keywords： magnetron sputering coating power supply; extended sate observer； fuzzy PI control; super twisting sliding mode control

0 引言

磁控溅射镀膜技术具有溅射效率高、薄膜结合力好、沉积温度低等优点，因此被广泛应用于真空镀膜行业中[1-2]。（剩余11245字）