工业现场材料结构原位微纳成像的原子力显微镜研究

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中图分类号：TB9;TH89 文献标志码：A 文章编号：1674-5124（2026）02-0082-07

Abstract： During the service process of major equipment such as ultra supercritical power plant boilers，large petrochemical plants and gas turbines，the measurement and evaluation of material creep，fatigue，and other accumulated damage are key to their safety evaluation and life prediction. The current method of using laboratory metalographic observation after sampling has prominent problems such as damaging structural integrity and long inspection cycles. Atomic force microscope is a measurement technology that can achieve three-dimensional morphology imaging of materials at the micro nano scale.But in the past，atomic force microscope instruments were mainly laboratory bench instruments. This article proposes the development of an atomic force microscope that can achieve in-situ micro nano imaging of material organization structure in industrial sites.The detection mechanism and probe characteristics of atomic force tuning fork probes are analyzed. A complete machine structure suitable for in-situ detection is designed.The actual imaging capability is verified.The test results on standard samples and pipeline samples show that the maximum range of a single measurement is 100μm×100μm ，the image resolution is 0.1nm ，and the defect resolution is 10nm . This study can rapidly and accurately detect micro damage defects of major equipment and accumulate multi-scale timevarying characteristic data of damage evolution. It is of great value for ensuring the stable operation of equipment and guide material improvement.

Keywords： atomic force microscopy; in-situ detection; industrial site; special equipment; microscopic damage defect

0 引言

在能源动力、石油化工和航空航天等重要领域中，如超超临界火力发电设备中的汽轮机、电站锅炉和主蒸汽管道，石油化工系统中的高温高压反应容器和管道，航空航天领域里的发动机涡轮叶片以及核电反应堆设备中的某些关键部件等，高温蠕变、疲劳以及腐蚀等因素导致材料发生损伤是长期危及装备结构完整性的"顽疾”。（剩余8091字）