压电纤维驱动的粘滑式跨尺度微夹持器

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关键词：微操作系统；压电驱动；粘滑运动；柔顺机构；微夹持器中图分类号：TN384 文献标识码：Adoi：10.37188/OPE.20253323.3723 CSTR：32169.14.OPE.20253323.3723

Abstract： To meet the requirements of large stroke，high precision，high speed，and translational clamping in micro-operation and micro-assembly，a symmetric stick -slip actuation mechanism is realized by em ploying a single macro fiber composite （MFC） to drive a compliant mechanism. This configuration enables the design of a cross-scale microgripper that combines centimeter-level travel with nanometer-scale resolution and dual-arm translational motion.An elongated compliant driving foot is used to store and release elastic potential energy，and its elastic recovery is exploited to counteract reverse friction，thereby suppressing stick-slip backlash. At the same time，the large single-step displacement of the MFC allows the microgripper to achieve high-speed motion at low driving frequencies，efectively reducing frictional wear.A static mechanical modelof the compliant driving unit is established using the finite element method，and its output displacement and natural frequency are numerically analyzed. An experimental setup is then constructed to evaluate the performance of the proposed system.Experimental results indicate that the output single-step displacements of the stick - slip microgripper are 52.31μm ， 82.86μm ，and 124. 68 μm under driving voltages of 400V ， 600V ，and 800V ，respectively，with a motion resolution of 9.6 nm.Under continuous operation with a driving voltage range of -400–800V ，the single-step displacement reaches up to 163.35μm ，with a step resolution of 7.8nm and a clamping stroke of 14.4mm . In addition，the designed microgripper achieves a motion speed of 1.25mm/s at a low driving frequency of 5 Hz. The clamping force ranges from O to 167mN under an 800V trapezoidal wave voltage. These experimental results confirm the effectiveness and high-performance output characteristics of the proposed stick - slip microgripper.

Key words：micro-operation system；piezoelectric actuation；stick-slip motion；compliant mechanism; microgripper

1引言

目前，微操作系统广泛应用于微创手术、光纤精密对准和扫描探针显微检测等高精密领域[1-3]。（剩余17029字）