宽波段光栅国内外研究综述

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中图分类号：TH744 文献标识码：Adoi：10.37188/OPE.20253323.3593

Abstract： Diffraction gratings serve as the core optical components in spectroscopic instrumentation. Broadband gratings，in contrast to conventional gratings，fulfill spectral analysis requirements across extended wavelength ranges. This paper reviews four principal types of broadband gratings： complex grooveshaped gratings， zoned gratings， intermediate-step gratings，and multilayer dielectric gratings. Their respective structures and operational principles are introduced，accompanied by a summary of recent research progress. Key characteristics are delineated as folows： complex groove-shaped gratings exhibit high spectral continuity and stable difraction eficiency，yet their performance is highlysensitive to fabrication precision; zoned gratings offer considerable design flexibility and benefit from mature processing techniques， but suffer from phase mismatch，difraction field disparities between sub-zones，and susceptibility to stray light；intermediate-step gratings enable high-resolution response over broad wavelength ranges at high diffraction orders， though their accuracy is constrained by manufacturing equipment and process complexity; multilayer dielectric gratings provide adaptable structural design and strong environmental adaptability，but impose stringent demands on material selectionand multilayerfilm thickness control.Finaly，future development directions for broadband diffraction gratings are outlined to inform subsequent research.

Key words： spectrometer; broadband grating; diffraction grating； blaze grating；echelle grating

1引言

衍射光栅[1-3]是一种具有规律性结构的精密光学元件，具备优越的色散特性，因此作为核心光学元件被广泛应用在各类光谱仪器[46中。（剩余44095字）