弱耦合谐振式超高灵敏度微力传感器

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关键词：微力传感器；弱耦合谐振器；模态局部化;振幅比输出;振幅比输出中图分类号：TP212 文献标识码：Adoi：10.37188/OPE.20253323.3714 CSTR：32169.14.OPE.20253323.3714

Abstract：To overcome the limitations of traditional micro-force sensors in complex measurement scenariOs requiring high sensitivity and high resolution，a weakly coupled resonant micro-force sensor based on mode localization technology is proposed and developed. A hybrid architecture is adopted，in which a beryllium bronze coupled resonator is integrated with a flexible lever mechanism，enabling micro-force measurement through monitoring of the amplitude ratio.By employing a flexure hinge structure，the applied micro-force is efficiently transformed into an axial stifess variation of the perturbed resonator，thereby achieving ultra-high measurement sensitivity. The validity of the design model is verified through theoretical analysis and numerical simulation. An experimental system is constructed for mechanical amplitude measurement and micro-force calibration，allowing comprehensive evaluation of sensor performance. Ex- perimental results indicate that the developed micro-force sensor provides a measurement range of 0⋅120mN ，arelative sensitivity exceeding 135×10-6/μN -more than 4，6OO times higher than that of conventional strain-type micro-force sensors-and a resolution better than 30μN . These results confirm the feasibility of the weakly coupled resonant structural scheme and demonstrate a novel approach for ultra-highsensitivity micro-force measurement.

Key words： micro-force sensor; weakly coupled resonators； mode localization； ultra-high sensitivity;amplitude ratio output

1引言

微力测量在精密加工[1]、生物医学[2]、航空航天[3等领域应用广泛。（剩余11076字）