基于相位测量偏折术的复杂曲面测量系统

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关键词：光学测量；复杂曲面；条纹反射；相位测量偏折术；积分重构中图分类号：O436；TP394.41 文献标识码：Adoi：10.37188/OPE.20253323.3658 CSTR：32169.14.OPE.20253323.3658

Abstract： To enable high-precision measurement of complex surfaces，a fringe reflection measurement system based on phase measuring deflectometry was developed. The study addressed the system's structural design，calibration procedures，and metrology algorithms for a configuration comprising a camera，a display screen，and the tested object. High-performance display screens and cameras were selected according to the object's size and surface geometry. Instrument-specific calibrations were performed for the chosen display and camera，and the spatial relationships among the three components were established using a high-precision articulated-arm measuring device.System calibration was completed by combining computer-aided optimization with CODE V simulation analysis.Finally，an integral reconstruction algorithm was implemented to obtain high-precision surface measurements. Experimental results indicate that the pro posed system achieves measurement performance comparable to LUPHOScan and ZYGO&CGH，with wavefront RMS accuracy exceeding λ/50 .The system features a simple architecture，large dynamic range，and strong immunity to interference，thereby enhancing measurement efciency and accuracy for complex surfaces and satisfying industrial processing and assembly requirements while improving equipment performance.

Key words： optical metrology；complex surface；fringe reflection；phase measuring deflectometry；integral reconstruction

1引言

随着光学制造技术的持续迭代升级，行业对光学元件及系统的精度标准提出了更高的要求，复杂曲面凭借其独特优势，愈发成为设计领域的优选。（剩余15871字）