微纳米三坐标测量机的技术进展
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中图分类号：TH71；TH74 文献标识码：Adoi：10.37188/OPE.20253323.3672 CSTR：32169.14.OPE.20253323.3672
Abstract：In the field of advanced manufacturing，ultra-precision components are indispensable for nation al key equipment and high-end instruments，including aircraft engine fuel nozzles，precision gears，optical elements，and semiconductor devices. The characteristic dimensions of these components range from hundreds of micrometers to hundreds of millimeters，while the required dimensional accuracy can reach tens to hundreds of nanometers. To guarante the quality and functional performance of such components，threedimensional ultra-precision measurement is essential. This paper presents a comprehensive review of the development of micro- and nano-coordinate measuring machines （micro/nano CMMs） over the past two decades. The structural designs and measurement principles of micro/nano CMMs are systematically summarized，and key technologies—including error compensation methods，nano-probe design，measurement environment control，and system testing and application-are analyzed in depth. Particular emphasis is placed on the research progress and latest advances in four generations of micro/nano CMM prototypes developed at Hefei University of Technology. Recent work is highlighted，including an innovative volumetric error modeling and compensation method for micro/nano CMMs based on the Abbe and Bryan principles.This method enables nano-precision measurement of internal dimensions with characteristic sizes below 100μm and large depth-to-width ratios. Finally， future research directions and potential application prospects of micro/nano CMMs in ultra-precision manufacturing are discussed.
Key Words： precision measurement; Micro-Electro-Mechanical System（MEMS）; Coordinate Measuring Machine（CMM）；high aspect ratio structures；nano probe；Abbe error;volumetric error compensation
1引言
随着微机电系统（Micro-Electro-MechanicalSystem，MEMS）技术与半导体产业的快速发展，微加工技术催生出一系列关键器件，如航空发动机喷油孔、精密齿轮涡轮、微透镜阵列和硅通孔（Through SiliconVia，TSV）等[1-5]。（剩余30266字）
