聚偏氟乙烯柔性压电式传感器的研制与应用研究

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关键词：聚偏氟乙烯；纳米纤维素；氧化锌；柔性压力传感器；生理信号监测中图分类号：TM22；TB33文献标志码：ADOI：10.7652/xjtuxb202605016 文章编号：0253-987X（2026）05-0164-10

Study on the Development and Application of Polyvinylidene Fluoride Flexible Piezoelectric Sensor

LIU Yuan1，LI Yingjun1'²，WANG Guicong1，²，MENG Lingyuan1 （1.School of Mechanical Engineering，University of Jinan，Jinan 25oo22，China; 2. Shandong Key Laboratory of Sensing Technologyand High Precision Weighing Instruments，Jinan 250o04，China）

Abstract： To address the issues of low sensitivity，complex fabrication processes，and difficulties in accurately detecting dynamic physiological signals in flexible sensors，a synergistic modification strategy using cellulose nanofibers （CNF） and zinc oxide （ ZnO ）is adopted. By employing an ultrasonic-assisted dispersion combined with magnetic stiring process， the distribution of nanofillers was optimized. A polyvinylidene fluoride （PVDF）-based composite piezoelectric film with a thickness of 0.1mm was fabricated via the solvent evaporation method，and a polyimide （PI） tape-based flexible encapsulation process was developed to construct a wearable sensor device. Experiments show that the sensor exhibits a linear response within the pressure range of 0-700Pa ，with a goodness-of-fit R2 of O.983. The voltage sensitivity reaches 1.1676V/kPa ， representing a 30% improvement compared to PVDF flexible sensors. The response/recovery time is 13， 204ms ，and the sensor successfully achieves high-fidelity capture of multi-frequency physiological signals such as human wrist and elbow movements，carotid artery pulsations，and nasal airflow vibrations. The study confirms that the synergistic enhancement mechanism of CNF/ZnO significantly improves the piezoelectric performance of PVDF， providing a new material solution for wearable physiological signal monitoring.

Keywords： Polyvinylidene fluoride； cellulose nanofiber； zinc oxide；flexible pressure sensor;physiological signal monitoring

与传统金属基传感器相比，柔性传感器具有轻量化、柔韧性好与可拉伸性强的特点，因此柔性传感器得以成功应用于气体传感[1]、人体医疗[2]、人体生理指标检测[3]、人体运动监测[4]及个性化健康监测[5]等领域。（剩余13999字）