超高精度平面度误差的混合优化评定及应用

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关键词：精密测量；平面度误差；序列二次规划；粒子群优化；非接触式平面度检测仪中图分类号：TH701；TP391 文献标识码：Adoi：10.37188/OPE.20263403.0393 CSTR：32169.14.OPE.20263403.0393

Hybrid optimization evaluation and application of ultra-high precision flatness error

TANLuyang¹，QI Tianfei¹，WU Zhiyuan¹，ZHANGHongzhi 1，2 ，JIAXuezhi ， ZHANG Leil*

（1.Chang Guang Satellite Technology Co.，Ltd， Changchun l3OoOO， China; 2. Changchun Institute ofOptics， Fine Mechanics and Physics， Chinese Academy of Sciences， Changchun ，China） * Corresponding author， E-mail： 1847468190@163.com

Abstract：To overcome the limited computational accuracy and slow convergence of conventional inteligent optimization algorithms in flatness error evaluation，a high-precision and high-eficiency evaluation method is developed to satisfy the stringent algorithmic requirements of a self-developed 1200mm -aper ture non-contact flatness measurement instrument. A hybrid PSO-SQP algorithm is proposed，in which Sequential Quadratic Programming （SQP） is employed as the primary framework and Particle Swarm Optimization （PSO）is incorporated as an auxiliary global search strategy. The global exploration capability of PSO is leveraged to perform a coarse search and rapidly identify a near-global optimum，which is used as a high-quality initial point for SQP. An adaptive step-size strategy is introduced in the refinement stage to replace the conventional fixed step size，enabling rapid and stable convergence during local optimization.Experimental results indicate that the proposed PSO-SQP algorithm exhibits strong robustness to initial-point deviations，sampling scale variations，and measurement noise.Relative to a high-precision coor dinate measuring machine（CMM），the deviation of the evaluation results is below 7nm . Engineering applicability is further validated through the evaluation of a 280mm -diameter flat mirror in a practical measurement scenario，where the obtained flatness is consistent with the specified surface form accuracy. Overall，the proposed algorithm provides high computational accuracy，fast convergence，and strong ro bustness，ofering a reliable and eficient solution for flatness error evaluation in precision manufacturing.

Key words： precision measurement； flatness error; sequential quadratic programming； particle swarm optimization；non-contact flatness measuring instrument

1引言

平面是零件最重要和最常用的几何形状之一，经常被作为其他几何形状的检测基准，其精度影响着零部件和产品的装配精度[1]。（剩余12772字）