细束径离子束变去除函数加工工艺及补偿

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关键词：光学加工；离子束加工；细束径；变去除函数；驻留时间；非线性补偿中图分类号：TN305.2文献标识码：Adoi：10.37188/OPE.20263403.0353 CSTR：32169.14.OPE.20263403.0353

Machining process and compensation for variable removal function withfine-diameterionbeams

MAO Xu 1，2，3 ， ZHANG Feng 1，3∗ ， TANG Wa 1，3 ，HU Haixiang 1，3 ， JI Peng 1，3 ， ZHANG Xuejun 1，3

（1. Changchun Institute of Optics， Fine Mechanics and Physics， Chinese Academy of Sciences ， Changchun 130033， China; 2. University of Chinese Academy of Sciences， Beijing 1Oo049， China; 3. State Key Laboratory of Aduanced Manufacturing for Optical Systems， Changchun Institute of Optics， Fine Mechanics and Physics， Chinese Academy of Sciences，Changchun l3OO33， China） * Corresponding author，E-mail： zhangfjyz@sina. cn

Abstract：Deterministic ion-beam figuring of high-precision optical surfaces requires stable and accurately controllable removal functions. To improve in-process control of the ion-beam removal function and to establish a variable removal-function compensation model for fine-beam-diameter ion beams，a systematic framework was developed for investigating，compensating，and optimizing removal-function variability during machining.First，the practical instability of the removal function was analyzed theoretically. Subsequently，the governing factors were derived and clasified into direct effects （thermal accumulation and energy distribution）and indirect effects （dwell time and lateral velocity）.Dynamic removal-function experiments were then performed to validate the influence of dwel time on the removal rate， and tests using two beam diameters confirmed the generality of the observed behavior. Finally，a compensation strategy and machining guidelines were proposed based on the efect of lateral velocity on the removal rate. The results demonstrate that regulating dwel time and lateral velocity can significantly enhance the convergence rate in fine-beam-diameter machining of high-precision optical surfaces. In subnanometer machining validation，a 0.332nm RMS figure error was achieved on a 100mm ULE flat mirror，satisfying practical requirements for stability，reliability，high precision，and controllability of finebeam-diameter ion-beam processing.

Key words： optical manufacturing；ion beam figuring; fine beam diameter； variable removal function; dwell time；nonlinear compensation

1引言

随着先进光学系统向高数值孔径光刻、X射线反射镜与自由电子激光、高功率激光装置等方向发展，光学元件对面形精度、斜率误差以及中高频误差抑制提出了更严苛的要求。（剩余14873字）