阶梯式聚磁永磁定位磁针设计与试验

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关键词：巨量转移；阶梯式结构；动态模型；磁场优化

中图分类号：TN312.8 文献标识码：A

doi：10.37188/OPE.20253320.3228 CSTR：32169.14.OPE.20253320.3228

Abstract： To improve the magnetic density peak-to-valley effect the permanent magnet positioning array magnetic needle in the fluid magnetic masstransfer Mini/Micro LED chips，a stepped polymagnetic permanent magnet positioning magnetic needle was proposed. For this stepped polymagnetic permanent magnet needle structure，a multistage equivalent magnetic circuit model incorporating nonlinear demagnetization effects magnetic circuit saturation characteristics，as wellas a mechanical dynamic model considering chip motion characteristics fluid-structure interaction，were established.Based on this，with the core objectives improving the magnetic field peak-to-valley change rate peak-to-valley change speed，the height diameter parameters each stage the magnetic needle were subjected to step-bystep parametric simulation using finite element analysis stware. This determined the optimal three-dimensional structural parameters for a high-performance magnetic needle under specific geometric scale process constraints. A prototype magnetic needle was developed based on the optimization results， the effectiveness the optimization was verified through magnetic needle magnetic density measurement tests mass transfer tests.The results show that the optimized magnetic needle achieved a magnetic density peak-to-valley change rate δ 82.3% a peak-to-valley change speed 5 44.8mT/mm ，representing improvements 20.1% 28.7% ，respectively. A fluid magnetic mass transfer experiment involving 4 5OO chips was conducted on a 180mm×160m m receiving substrate，with a transfer time only 3 minutes，reducing the time by 40% compared to existing solutions.

keywords： mass transfer; stepped structure; dynamic model; magnetic field optimization

1引言

随着显示技术的发展，微型发光二极管（Mini/MicroLED）作为继液晶显示器和有机发光二极管之后的新一代LED技术，与前代技术相比具有亮度高、响应快、功耗低、寿命长、色彩还原度高等优点[14]，为高效率、大批量生产提供了强大动力。（剩余13362字）