基于输入整形的单压电变形镜振动抑制

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中图分类号：TH74 文献标识码：Adoi：10.37188/0PE.20253319.3070

Abstract： An input-shaping -based vibration suppresson control method is proposed to mitigate miror vibrations of a unimorph deformable mirror during operation.The miror’s structural characteristics were analyzed to develop a dynamic model. The effects of input shapers on step-response characteristics（displacement overshoot and setling time）were then simulated. An experimental platform was constructed to validate the simulation results.Finally，the influence of the shaping technique on control performance was assessed via defocus wavefront reconstruction simulations. At a control frequency of 5000Hz ，application of the input shaper reduced displacement overshoot from 32. 1% to nearly zero and shortened settling time from 4.3O ms to O.57 ms. In wavefront reconstruction simulations，overshoot decreased from 34% to less than 1% ，while settling time improved from 3.95ms to 0.58ms ， substantially enhancing both response speed and control accuracy. The designed input shaper is shown to effectively suppress vibrations of unimorph deformable mirrors.

Key words： unimorph deformable mirror; input shaping; vibration suppression; adaptive optics system

1引言

单压电变形镜作为一种波前校正器，具有结构简单、成本较低、变形量大等优点，在自适应光学领域中受到广泛青睐[1-2]。（剩余9694字）