跨尺度微纳米三坐标测量机研制及误差分析

打开文本图片集

关键词：微纳米测量机；无阿贝误差；宏微运动系统；精密测量；误差分析中图分类号：TH711；TB9 文献标识码：Adoi：10. 37188/OPE.20253319.3058 CSTR：32169.14.OPE.20253319.3058

Abstract： To resolve the conflict between large-stroke motion high-precision measurement，a novel cross-scale micro - nano coordinate measuring machine（CSMN-CMM） with a 100mm×100mm× （20 100mm measuring volume is presented. Unlike conventional coordinate measuring machines （CMMs）， the CSMN-CMM adopts an independent metrology system layout that satisfies the Abbe principle in all three dimensions，thereby isolating the metrology system from motion-induced disturbances eliminating Abbe error. The motion architecture comprises a 3D air-bearing macro-motion stage coupled with a six-degree--freedom micro-motion stage；this macro-micro collaborative motion scheme improves measurement eficiency while enabling high-precision triggering probing. For probing，either a high-precision 3D contact probe or a resonant probe is employed，with the resonant probe capable using microspheres down to 70um in diameter. Major error sources were addressed by developing a spatial error-compensation model based on coordinate transformation by applying error-separation techniques. Measurement performance was assessed in accordance with ISO 1O36O-2，yielding a maximum permissible error （MPE）better than ± （250nm+3.6×10-6×L） .Experimental results demonstrate sub-micron 3D measurement accuracy the ability to measure internal features as small as 100μm . The proposed structural design enabling technologies represent a significant advance for high-precision 3D metrology.

words： micro-nano coordinate measuring machine； Abbe eror-free； macro-micro motion system;precision measurement;error analysis

1引言

随着微机械加工及微机电系统（Micro-Elec-troMechanicalSystem，MEMS）的快速发展，超精密器件的应用日益广泛，如航空发动机燃油喷嘴、精密齿轮、光学元件、半导体器件等。（剩余13471字）