硅反射靶增强的飞秒激光融石英微半球 谐振子释放技术

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中图分类号：TN249 文献标识码：A

doi：10. 37188/OPE. 20253306. 0905 CSTR：32169. 14. OPE. 20253306. 0905

Femtosecond laser fused silica microhemispherical resonator release enhanced by a silicon reflective target

ZHUANG Xuye1，QIAO Qi1，GAO Zhongfeng1，HAN Shilin1，HU Youwang 2 ，LI Pinghua1*

（1. College of Mechanical Engineering，Shandong University of Technology，Zibo 255000，China； 2. College of Mechanical and Electrical Engineering，Central South University，Changsha ，China） * Corresponding author，E-mail：lipinghua@sdut. edu. cn

Abstract：The fused silica micro-hemisphere resonator gyroscope is one of the most promising miniature vibratory gyroscopes，offering advantages such as a simple structure，high precision，and strong anti-inter⁃ ference capability. The micro-hemisphere resonator is the core component of the gyroscope，and its fabri⁃ cation process is critical for performance. This study proposed a method to improve release quality while maintaining processing efficiency. In this study，a femtosecond laser was used for the release process， with the laser focused on the lower surface of the fused silica resonator through a silicon reflective target placed beneath it. This setup enhanced the intensity of the femtosecond laser inside the material，improv⁃ ing both the release speed and surface quality. A simplified mathematical model for laser intensity distribu⁃ tion inside fused silica and FDTD simulations were employed to analyze the laser energy field during fem ⁃ tosecond laser processing. The optimal process parameters were determined from the analysis. Experi⁃ mental results show that when the single pulse energy is set at 2.2μJ and the release speed is between 0.2mm/s and 0.5mm/s ，a 300μm thick quartz sheet was released with a release width ranging from 34.31μm to 35.16μm ，and a surface roughness less than 400nm . The release width increased by approx⁃ imately 236% compared to the conventional focusing on the upper surface. This method effectively im ⁃ proves the release quality of the micro-hemisphere resonator，providing a solid technical foundation for the fabrication of high-quality fused silica resonators.

Key words：femtosecond laser release； fused silica； reflective target； curve fitting； Finite-DifferenceTime-Domain（FDTD）simulation

1 引 言

微 机 电 系 统（Micro-Electro-Mechanical Sys⁃tems， MEMS）技术发展迅速，振动式陀螺仪因其体积小、功耗低、性能优越，广泛应用于无人机、车辆、卫星以及航天器的姿态控制和导航系统［1-2］。（剩余16129字）