双向高过载硅基差压敏感元件的研制

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Development ofbi-directional high overload silicon-based differential pressure sensitive element

（1. State Key Laboratory of High-performance Precision Manufacturing，Dalian University of Technology，Dalian 116024，China; 2. Key Laboratory forMicro/Nano Technology and System ofLiaoning Province，Dalian University of Technology，Dalian116024，China） * Corresponding author， E -mail： duliqun@dlut. edu. cn

Abstract：In order to improve the bi-directional overload capability of diffrential pressure sensors，a beam-archipelago dislocated membrane structure differential pressure sensitive element was designed in this paper. The sensitive element consisted of a beam-archipelago silicon membrane structure bonded to a glass substrate. The beam structure reduced the stress concentration，and the archipelago structure improved the structural rigidity；the glass substrate was designed with square grooves and circular through holes on the bonding surface，and the dislocation structure formed by the square grooves of the silicon membrane structure and the glass substrate further reduced the maximum stress.Firstly，the stress distribution，fullscale output，and maximum stress of the bi-directional high overload silicon-based diferential pressure sensitive element were analyzed using finite element software. Secondly，the relationship between structural dimensions and burst pressure was analyzed，and the structural dimensions at maximum burst pressure were solved through dimensional optimization. Finally，a silicon-based differential pressure sensitive element with bi-directional high overload was fabricated using the MEMS silicon process.The pressure test results show that the fabricated bi-directional high overload silicon-based diferential pressure sensitive element has a burst pressure of 8.5 times scale，which is 30.7% higher overload capacity compared with the traditional C-type membrane structure diffrential pressure sensitive element （burst pressure 6.5 times scale）.The experimental results demonstrate that the beam-archipelago dislocation membrane structure can effectively improve the bi-directonal overload capacity of the differential pressure sensitive element.

Key Words： Micro-Electro-Mechanical System（MEMS）；diferential pressure sensitive element； finite element；size optimization; overload capacity

1引言

微机电系统（Micro-Electro-Mechanical System，MEMS）硅基差压传感器因其结构紧凑、易于集成、性能好、可靠性高和成本低等特点1，已成为应用最广泛的压力传感器之一。（剩余11576字）