磁阻驱动柔顺精密定位平台设计与测试分析
打开文本图片集
关键词：磁阻驱动器；柔性机构;磁滞；精密定位平台；轨迹跟踪控制中图分类号：TP394.1;TH691.9 文献标识码：Adoi：10.37188/OPE.20263404.0586 CSTR：32169.14.OPE.20263404.0586
Design and test analysis of a compliant precision positioning stage driven by reluctance actuators
WANG Wei¹，YIN Xiaoqia 2* ， LAI Leijie 1 ，ZHU Limin³
（1. School ofMechanical and Automotive Engineering，Shanghai University ofEngineering Science， Shanghai 201620，China;
2. School ofMechanical and Power Engineering，East China University of Science and Technology， Shanghai 200237， China;
3. State Key Laboratory ofMechanical System and Vibration， School ofMechanical Engineering， Shanghai Jiao Tong University，Shanghai 2OO24O，China） * Corresponding author， E -mail： xiaoql216@ecust. edu. cn
Abstract：To meet the comprehensive requirements of high force density and high-precision control for a medium-stroke micro-nano precision positioning stage，a compliant precision positioning stage based on reluctance actuators was designed and analyzed，with nonlinear hysteresis modeling and trajectory tracking control implemented.First，by analyzing the equivalent magnetic circuit of the reluctance actuator and its drive force characteristics under diffrent air gaps，combined with the stiffess model of the flexure mechanism，the stage design parameters and the suitable air gap size for stage operation were determined. Subsequently，an experimental system was setup，and a feedforward compensation strategy incorporating a rational function anda Prandtl-Ishlinski hysteresis inverse model was constructed to achieve nonlinear compensation for the reluctance actuator. Finally，a feedback control method comprising proportional-integral control and a notch filter was utilized to conduct trajectory tracking control experiments. Experimental results demonstrate that the constructed hysteresis inverse model compensation and control method significantly enhances the stage's control accuracy. After nonlinear compensation，the root mean square errors for tracking two different triangular wave signals were reduced by 69.2% and 63.68% ，respectively，validating the feasibility and effectiveness of the designed compliant precision positioning stage using reluctance actuation in micro-nano positioning applications.
Key words： reluctance actuator; compliant mechanism； hysteresis； precision positioning stage; trajectory tracking control
1引言
中短行程（ 200～500μm 精密定位平台常采用压电陶瓷驱动器或音圈电机结合柔性机构实现。（剩余15530字）
