跨尺度驱动纵切模态压电电机设计与实验

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关键词：压电电机;纵切模态;跨尺度驱动；压电陶瓷；准静态中图分类号：TP359.9 文献标识码：Adoi：10. 37188/OPE. 20263401.0112 CSTR：32169.14.OPE.20263401.0112

Design and experiment on longitudinal-shearing mode piezoelectric motor driven by cross-scale forces

ZENG Sizhe，FENG Yaohui，WANG Haoran，WANG Ya，LI Ruijun，PAN Qiaosheng （School of Instrument Science and Optoelectronic Engineering， Hefei University of Technology， Hefei230009，China） * Corresponding author，E-mail： panqs@hfut. edu. cn

Abstract： To overcome the limitation of existing piezoelectric motors in simultaneously achieving highspeed motion and high-resolution positioning，a cross-scale longitudinal-shearing hybrid vibration piezoelectric motor was designed. Dual-mode operation in quasi-static and resonant states was implemented to satisfy the combined requirements of speed and precision in precision-drive applications.The stator integrates a longitudinal vibration transducer driven by the piezoelectric d33 effect and a sandwiched shear transducer driven by the d15 effect. Elliptical motion at the driving foot is generated by orthogonal vibrations at identical frequencies.Key parameters were optimized via finite-element simulation（COMSOL）. For quasi-static operation，the primary hinge stiffness was set to 16.66N/μm to improve displacement output efficiency; for resonant operation，structural parameters were tuned to achieve modal degeneration of the longitudinal （ 7829.6Hz ）andbending（ 7860.7Hz ） vibrations. The experiments showed that under quasistatic excitation （ 800Hz ，preload 0.38N ），a minimum displacement resolution of 39nm and a maximum speed of 0.95mm/s were achieved. Under resonant excitation（ 6780Hz ， 30∘ phase difference），a maximum no-load speed of 125.33mm/s and a peak load capacity of 0.45N were obtained. The proposed motor outperforms conventional single-mode piezoelectric motors in both speed （ 125.33mm/s ）andresolution（ 39nm ），effectively mitigating the intrinsic trade-off between high speed and high precision and pro viding a practical solution for cross-scale precision positioning drives.

Key words： piezoelectric motor; longitudinal-shearing mode； cross-scale driving； piezoelectric ceramics;quasi-static

1引言

随着半导体制造、精密测量和生物医疗等领域的迅速发展，对精密驱动系统的性能要求逐渐提高。（剩余15236字）