基于MWCNTs/PDMS的仿蝎子栉器结构柔性压力传感器制备及性能表征

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中图分类号：TP212 文献标志码：A 文章编号：1673-3851（2026）05-0298-08

Reference Format： CHEN Zhaoyang，DU Mengsheng，JIA Boyu，et al.Fabrication and performance characterization of a scorpioncomb-inspired flexiblepresuresensorbasedonMWCNTs/PDMS[J].Journal of Zhejiang Sci-Tech University， 2026，55（3） ：298-305.

Fabrication and performance characterization of a scorpion combinspired flexible pressure sensor based on MWCNTs/PDMS

CHEN Zhaoyang ，DU Mengsheng，JIA Boyu，ZHANG Huiqing （1.School of Science， Xi'an University of Architecture and Technology，Xi'an 710o55，China; 2. Institute of Flexible Electronics，Northwestern Polytechnical University， Xi'an 71Ol29，China）

Abstract：Traditional rigid sensors lack portability and flexibility while existing flexible pressure sensors generally suffer from complex fabrication processes， high costs，and failure to simultaneously achieve a wide detection range and high sensitivity. To address these issues，this study aimed to realize the synergistic optimization of wide detection range and high sensitivity for flexible pressure sensors. It fabricated a high-performance bionic flexible piezoresistive pressure sensor using a design integrating a bionic scorpion pectine structure and root diameter reduction， with multi-walld carbon nanotubes （MWCNTs）/polydimethylsiloxane （PDMS） composite as the conductive layer. Field emission scanning electron microscopy was used to systematically characterize the surface morphologies of scorpion pectines and the sensor. ABAQUS was employed to verify the rationality and superiority of the bionic structure， and the sensor's sensing performances including sensitivity，response time，detection range and durability were tested through experiments. Results show that MWCNTs disperse uniformly in the PDMS matrix.The bionic structure exhibits significant stress concentration effect. The sensor achieves a high sensitivity of 2.755kPa-1 over a wide detection range of 4.73Pa to 790kPa ，with a response time as low as 170ms It also demonstrates excellent performance in monitoring human physiological signals. This study provides a new bionic approach for the structural design of the dielectric layer in flexible pressure sensors.

Key words： flexible pressure sensor; bionic structure; scorpion pectine; high sensitivity； wide range; health monitoring

0引言

近年来，随着可穿戴健康检测、医疗辅助和运动追踪等新兴领域的快速发展，压力传感器作为这些领域中的关键器件，已经成为研究热点并且受到广泛关注[1-2]。（剩余10081字）