基于复合结构抛光工具的铜衬底线性液动压抛光加工

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关键词：线性液动压抛光；复合结构；表面形貌；液动压力

中图分类号：TG580.692

DOI：10.3969/j.issn.1004-132X.2026.03.004 开放科学（资源服务）标识码（OSID）：

Abstract： To improve the surface morphology of copper substrates， a design method was proposed for composite structure polishing tools. Based on the principle oflinear hydrodynamic pressure and material removal model， numerical simulation analyses of hydrodynamic pressure flow field characteristics were carried out to verify the accuracy of simulation data and clarify the influences of processing parameters of copper substrate linear hydrodynamic pressure polishing on surface morphology. Results show that composite structures have a higher mean hydraulic pressure and smaller standard deviation than that of single spiral structures，non-uniform groove width structures，and variable thickness structures. Composite structures combine the advantages of high material removal rate of spiral structures，good surface morphology uniformity of non-uniform groove width structures，and variable thickness structures during polishing. The surface roughness parameters Sa ， Sq ，and PV are optimized to 4.778nm ， 6.086nm ，and 9.900nm ，respectively，when the processing parameters are set as follows： polishing time of 45min ，polishing speed of （204号 24000r/min ， and polishing gap of 20μm ：

Key words： linear hydrodynamic polishing； composite structure; surface morphology; hydraulic pres sure

0 引言

当今世界电子行业技术发展迅速，铜衬底薄膜元件因其优异的性能，在电子行业中有着广泛的应用，常被用于电力电子、机械制造以及高科技制造领域。（剩余12433字）