基于分数阶滑模自抗扰的压电定位台轨迹跟踪控制

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中图分类号：TP273 文献标识码：Adoi：10.37188/OPE.20263402.0218

Abstract： To achieve high-precision tracking of the piezoelectric positioning stage，a fractional-order ter minal sliding mode active disturbance rejection controller was developed to address hysteresis，model un certainties，and load disturbances.By integrating fractional-order theory，terminal sliding mode，and active disturbance rejection，the controllr ensured finite-time error convergence.A continuous and differentiable reaching law based on an improved fal nonlinear function was introduced to suppress chattering. Experimental results show that for a 10μm sinusoidal trajectory under a 200g load，the controller attains a root mean square error of 0.0246μm ，improving accuracy by 76. 66% ， 48.00% ，and 43.32% compared with PID，integer-order terminal sliding mode，and neural-network-based integer-order terminal sliding mode control，respectively.Undera 40Hz reference signal，it reducesthe average tracking error to 0.1869μm . The controller maintains excellent tracking across varying loads， effectively suppresses chattering，and exhibits strong robustness to model uncertainties and load disturbances.

Key words： piezoelectric positioning stage；fractional order； sliding mode control；fal function；extended state observer

1引言

压电定位台具有高精度、高分辨率、响应快的特点。（剩余17342字）