多光谱硫化锌高表面质量CMP工艺参数优化研究

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关键词：多光谱硫化锌；化学机械抛光;响应曲面法；高表面质量；灰色关联度分析法中图分类号：TP394.1;TH691.9 文献标识码：Adoi：10.37188/OPE.20253318.2868 CSTR：32169.14.OPE.20253318.2868

Optimization of process parameters of multi-spectral ZnS CMP with high surface quality

REN Jiatong 1 ，QIN Lin 2 ，ZHU Beibei²，CAIGen¹，CHU Jianning1，ZHANG Chupeng 1 ， CHEN Xiao1* （1. Key Laboratory ofModern Manufacturing Quality Engineering in Hubei Province， Hubei University of Technology，Wuhan 43OO68，China; 2. Shanghai Aerospace Control Technology Institute， Shanghai 2OllO9，China） * Corresponding author， E-mail： chenxiaol987jz@l63. com

Abstract： In order to solve the problem that it was difficult to obtain high surface quality of multi-spectral ZnS in chemical-mechanical polishing（CMP），this paper focused on the synergistic optimization of flatness and surface roughness to carry out experimental research. Through single-factor experiments， the optimal values and ranges for polishing time，abrasive type，rotational speed of the polishing disc，and polishing pressure were determined. Subsequently，response surface methodology was employed to design the experimental framework，and grey relational analysis was introduced to investigate the influence of these parameters and their interactions on surface morphology. The results show that the speed of polishing disk is the dominant factor affecting the surface quality，followed by polishing pressure and grain size. The optimum process parameters were determined by model optimization： abrasive grain size of 0.5μm ，polishing disc speed of 55r/min ，and polishing pressure of 16N . Under these conditions，the process was validated，and the surface flatness of the workpiece reached 112.49nm ，the roughness was reduced to 1.11nm and the surface morphology was uniform with fewer defects. The synergistic control of high precision and high quality of multi-spectral ZnS surfaces can be achieved by optimizing the CMP process parameters， providing technical support for its application in high-performance optical devices.

Key words： multi-spectral ZnS ; Chemical Mechanical Polishing（CMP）；response surface method；high surface quality； grey relational analysis

1引言

多光谱硫化锌（ZnS）是一种广泛应用于红外光学领域的关键材料，它具有优异的光谱透过性、良好的化学稳定性及较高的机械强度、抗热冲击性能等优点[1-2]，因此被广泛用于热成像、航空航天探测和红外制导等高性能光学系统[3-4]。（剩余16110字）